Bringing Sustainability to Semiconductor Manufacturing
The Center for Environmentally Benign Semiconductor Manufacturing
Mission
Improve performance, reduce cost, and lower the environmental health and safely (EHS) impacts of semiconductor manufacturing by partnering across the supply chain.
Incorporate EHS principles in engineering and science education.
Promote "Design for Environment and Sustainability" as a technology driver rather than a industry burden.
Goals and Objectives
- Develop novel strategic solutions to existing environmental, safety and health (ESH) problems in semiconductor manufacturing.
- Create new and effective environmentally benign manufacturing processes.
- Demonstrate the positive impact of design for environment on all aspects of semiconductor manufacturing.
- Develop innovative education programs in which environmental factors are integral parts of the curriculum.
- Provide technical forums for experts from industry, research institutions, and government agencies to exchange ideas and information on ESH concerns in semiconductor manufacturing.
Leadership
Director: Farhang Shadman, PhD, email: shadman@arizona.edu
Dr. Shadman is a Regents Professor of Chemical and Environmental Engineering, with a joint appointment as a Professor of Optical Sciences, at the University of Arizona. Dr. Shadman holds a PhD from the University of California, Berkeley and is the author of more than 110 journal articles, 3 book chapters, and 21 patents/invention disclosures. He has been recognized with the Akira-Inoue Award (2002), Landmark Innovation Award (2000), SRC/Sematech/SIA Excellence in Research Award (1998 and 1992), and SRC Invention Awards (1991 and 1992). He is a Fellow of American Institute of Chemical Engineers.
“The semiconductor industry is a very fast-moving and exciting industry, one which creates many opportunities for innovation and implementation of changes. The fast pace also presents a major challenge in planning and conducting long-term research. One challenge is to strike the right balance between long-term development, short-term relevance, and application to the present problems.”
History
Today, the Center for Environmentally Benign Semiconductor Manufacturing (CEBSM) is administered by the Department of Chemical and Environmental Engineering.
In 1996, the NSF/SRC Engineering Research Center (ERC) for Environmentally Benign Semiconductor Manufacturing was created as a result of a joint initiative between the University of Arizona (as lead institution), the Massachusetts Institute of Technology (MIT), Stanford University, and the University of California-Berkeley (UC Berkeley) with co-sponsorship from the National Science Foundation (NSF) and the Semiconductor Research Corporation (SRC).
The center’s goal was to create the science, technology, and educational methods needed to lead the semiconductor industry to a new era of environmentally benign manufacturing. When the ERC "graduated" from the NSF's Engineering Research Center program in 2006, the center continued in its firm commitment to its foundational goals and objectives, with support from SEMATECH / ISMI / SRC and in close partnership with companies involved to semiconductor manufacturing. For details on past projects and reports, visit the ERC's archival site.